Endura 5500 series
The Endura 5500 platform is an AMAT multi cavity device platform, mainly composed of loadlock cavity, buffer cavity, and transfer cavity. The main process cavity can be used for sputtering various metals such as AlCu, Al, AlSiCu, Ti, TiN, W, Ag, Ni, Cr, Ta, Cu, and also for MOCVD process.
描述
Product Features
1. Optional LCD touch panel to provide more convenient operation.
2. Optional dual hard drive system.
3. Upgrade the transfer and cavity kit to match the transfer and supporting processes of transparent and thin sheets.
4. Multiple cavity configurations can be customized.
5. Provide various new process development and solutions.
