Sequel
Sequel is Novellus' DLCM-based PECVD device that can be configured with up to three 6station process cavities according to different requirements and can process up to 18 wafers at the same time.
描述
Product Features
1. Optional dual hard drive system.
2. Upgradable and compatible transparent film.
3. MC1-MC4 controllers can be configured as required.
